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10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

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【PDF】for SF6 plasmas coupling reaction kinetics in the gas

10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

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PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Attachment Instabilities of SF6 Inductively Coupled Plasmas under Different Coupling Intensities

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【PDF】for SF6 plasmas coupling reaction kinetics in the gas

10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

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【PDF】for SF6 plasmas coupling reaction kinetics in the gas

10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

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